论文信息 - Toward Advanced High‐k and Electrode Thin Films for DRAM Capacitors via Atomic Layer Deposition - 字舞流文

Toward Advanced High‐k and Electrode Thin Films for DRAM Capacitors via Atomic Layer Deposition

Sang Woon Lee | Ju Young Sung | Hanjin Lim | Hyung-Suk Jung | Seo Young Jang | Jaeeun Jeon | Se Eun Kim | Hye Min Lee | Sang Mo Moon | Jun Goo Kang | Han Jin Lim | H. Jung | S. Jang | J. Sung