Foundry-CMOS integrated oscillator circuits based on ultra-low power ovenized CMOS-MEMS resonators

A cutting-edge ovenized micromechanical resonator circuit comprised of a double-ended tuning fork (DETF) resonator and serpentine-shaped heaters to enable ultra-low heater power of only 0.47 mW over the entire temperature range (-40°C to 85°C) has been reported for the first time in a low-cost, foundry CMOS-based fabrication platform. The combination of low thermal conductivity materials (i.e., SiO2 and poly-Si) and high thermal isolation designs is key to attaining low heater power consumption in a sub-mW level. An ovenized 1.2-MHz CMOS-MEMS oscillator with a phase noise lower than -103 dBc/Hz at 1-kHz offset and -110 dBc/Hz at 1-MHz offset was also demonstrated in this work, verifying the great potential of low power oven-controlled MEMS oscillators realized using the well-established CMOS-MEMS technology.