Structure design and mechanical characteristic test of cylindrical ultrasonic micromotor

This paper designed and developed a cylindrical ultrasonic micromotor on the basis of rectangle piezoelectric ceramics. The prototype motor is 2mm in diameter, 15mm in length and its weight is 0.28g. The finite element modal analysis of the stator was discussed. The first bending mode frequency 141KHz was obtained. Some mechanical characteristic of micromotor was evaluated. When the motor operates with the driving frequency at 103.2KHz and the peak value of driving voltage at 200V, its maximal rotation speed and the stall torque reach 531r/min and 0.52 mn·m.

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