PZT actuated micromirror for fine-tracking mechanism of high-density optical data storage
暂无分享,去创建一个
Hyo-Jin Nam | See-Hyung Lee | Youngjoo Yee | H. Nam | J. Bu | Y. Yee | See-Hyung Lee | Joong-Won Lee | Jong Uk Bu | Joong-Won Lee | See‐Hyung Lee
[1] Kam Y. Lau,et al. Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning , 1998 .
[2] Kukjin Chun,et al. A sticking model of suspended polysilicon microstructure including residual stress gradient and postrelease temperature , 1998 .
[3] Jong-Uk Bu,et al. Integrated multiwavelength laser source module with micromachined mirrors , 1999, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.
[4] Optical Background for Near-Field Recording , 1999 .
[5] Hyo-Jin Nam,et al. PZT actuated micromirror for nano-tracking of laser beam for high-density optical data storage , 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).
[6] R. Horowitz,et al. Angular micropositioner for disk drives , 1997, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.
[7] Kenneth B. Crozier,et al. Near-field photolithography with a solid immersion lens , 1999 .
[8] T. Ono,et al. A novel fabrication method of the tiny aperture tip on silicon cantilever for near field scanning optical microscopy , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).
[9] T. Hirano,et al. Micro-actuator for tera-storage , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).