Effect of Channel Aspect Ratio on the Flow Performance of a Spiral-Channel Viscous Micropump

We investigate the effect of channel aspect ratio on the flow performance of a newly introduced spiral-channel viscous micropump. An approximate 2D analytical solution for the flow field, which ignores channel curvature but accounts for a finite wall height, is first developed at the lubrication limit. A number of 3D models for spiral pumps with different aspect ratios are then built and analyzed using the finite volume method. Numerical and analytical results are in good agreement and tend to support one another The results are compared with an approximate 2D analytical solution developed for infinite aspect ratio, which neglects the effect of side walls, and assumes uniform velocity distribution across the channel width. The error in this approximation was found to exceed 5% for aspect ratios less than 10. Pressure and drag shape factors were introduced to express the effect of the pressure difference and boundary velocity on the flow rate at various aspect ratios for both moving and stationary walls

[1]  A. Manz,et al.  Design of an open-tubular column liquid chromatograph using silicon chip technology , 1990 .

[2]  D. J. Harrison,et al.  Capillary electrophoresis and sample injection systems integrated on a planar glass chip , 1992 .

[3]  H. Elderstig,et al.  A novel fabrication method of capillary tubes on quartz for chemical analysis applications , 1994, Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems.

[4]  Mohamed Gad-el-Hak,et al.  A Novel Pump for MEMS Applications , 1996 .

[5]  W. R. Dean XVI. Note on the motion of fluid in a curved pipe , 1927 .

[6]  D. J. Harrison,et al.  Electroosmotic pumping and electrophoretic separations for miniaturized chemical analysis systems , 1994 .

[7]  Michael P. Harold,et al.  Chemical performance and high temperature characterization of micromachined chemical reactors , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[8]  S. Terry,et al.  A gas chromatographic air analyzer fabricated on a silicon wafer , 1979, IEEE Transactions on Electron Devices.

[9]  Peter Woias,et al.  Micropumps—past, progress and future prospects , 2005 .

[10]  Yousef Haik,et al.  Design and Analysis of a Surface Micromachined Spiral-Channel Viscous Pump , 2003 .

[11]  S. Patankar Numerical Heat Transfer and Fluid Flow , 2018, Lecture Notes in Mechanical Engineering.

[12]  H. Schlichting Boundary Layer Theory , 1955 .

[13]  H. Lintel,et al.  A piezoelectric micropump based on micromachining of silicon , 1988 .

[14]  D. DeVoe,et al.  An electrohydrodynamic polarization micropump for electronic cooling , 2001 .

[15]  Howard A. Stone,et al.  Lubrication analysis and boundary integral simulations of a viscous micropump , 2000, Journal of Fluid Mechanics.

[16]  L J Kricka,et al.  PCR in a silicon microstructure. , 1994, Clinical chemistry.