The Effect of Amplitude Modulation on the Axial Resolution of Doppler-Based Ultrasonic Topography Measurement

Ultrasonic Doppler-based systems for surface topography measurements are attractive alternatives to the transit-time-based methods. Sensors used in Doppler systems are less dependent on the speed of the sound in air, although contemporary Doppler measurement systems are sensitive to the amplitude variation of the received signal. Amplitude variation significantly affects the measurement accuracy when the surface axial displacement range is comparable with the ultrasonic wavelength. This paper presents a theoretical and experimental study of the effect of amplitude modulation on the performance of the Doppler measurement techniques. A modified Doppler measurement system that significantly improves the measurement accuracy is also presented. The fabricated sensor has 72-μm measurement accuracy using 40-kHz transducers. This technique can also be employed in cost-effective displacement measurement applications that require high axial resolution.

[1]  J. Slotwinski,et al.  Ultrasonic measurements of surface roughness. , 1993, Applied optics.

[2]  I. Yamaguchi,et al.  Measurement of surface roughness by speckle correlation , 2004 .

[3]  Xiaomei Xu.  Non-contact surface roughness measurement based on laser technology and neural network , 2009, 2009 International Conference on Mechatronics and Automation.

[4]  Shinnosuke Hirata,et al.  Ultrasonic distance and velocity measurement using a pair of LPM signals for cross-correlation method: improvement of Doppler-shift compensation and examination of Doppler velocity estimation. , 2012, Ultrasonics.

[5]  Y. P. Huang,et al.  Envelope pulsed ultrasonic distance measurement system based upon amplitude modulation and phase modulation. , 2007, The Review of scientific instruments.

[6]  Mark R. Wiesner,et al.  A comparison of vertical scanning interferometry (VSI) and atomic force microscopy (AFM) for characterizing membrane surface topography , 2006 .

[7]  Ikuo Ihara,et al.  Surface roughness characterization through the use of diffuse component of scattered air-coupled ultrasound , 2006 .

[8]  A. Roncin,et al.  Non contact measurement of vibration using airborne ultrasound , 1996, 1996 IEEE Ultrasonics Symposium. Proceedings.

[9]  Farshid Forouzbakhsh,et al.  A new measurement method for ultrasonic surface roughness measurements , 2009 .

[10]  I. R. Gatabi,et al.  A novel doppler based ultrasonic surface roughness measurement , 2005, IEEE Ultrasonics Symposium, 2005..

[11]  O. Casula,et al.  An ultrasonic phase sensitive method for surface velocity measurements in a liquid , 1996, 1996 IEEE Ultrasonics Symposium. Proceedings.

[12]  Malcolm J. W. Povey.  5 – ADVANCED TECHNIQUES , 1997 .

[13]  N. Takenaka,et al.  Effects of the number of pulse repetitions and noise on the velocity data from the ultrasonic pulsed Doppler method with different algorithms , 2014 .

[14]  L. Angrisani,et al.  A measurement method based on Kalman filtering for ultrasonic time-of-flight estimation , 2004, IEEE Transactions on Instrumentation and Measurement.

[15]  E. S. Furgason,et al.  Surface roughness evaluation via ultrasonic scanning , 1993 .

[16]  P. Hilton.  Imaging Surface Roughness using Correlated Speckle Grain Pairs , 1997 .

[17]  Yasushi Takeda,et al.  Velocity Profile Measurements of Magnetic Fluid Flow using Ultrasonic Doppler Method , 1999 .

[18]  S. H. Wang,et al.  Application of an optical interferometer for measuring the surface contour of micro-components , 2006 .

[19]  Gian Marco Revel,et al.  Laser Doppler vibrometry and near-field acoustic holography: Different approaches for surface velocity distribution measurements , 2006 .

[20]  Dario Petri,et al.  Digital time-of-flight measurement for ultrasonic sensors , 1991 .

[21]  Enrique Barbieri,et al.  A method for short or long range time-of-flight measurements using phase-detection with an analog circuit , 2001, IEEE Trans. Instrum. Meas..

[22]  Ke-Nung Huang,et al.  A High-Resolution Ultrasonic Distance Measurement System Using Vernier Caliper Phase Meter , 2012, IEEE Transactions on Instrumentation and Measurement.

[23]  F. Gueuning,et al.  Accurate distance measurement by an autonomous ultrasonic system combining time-of-flight and phase-shift methods , 1996, Quality Measurement: The Indispensable Bridge between Theory and Reality (No Measurements? No Science! Joint Conference - 1996: IEEE Instrumentation and Measurement Technology Conference and IMEKO Tec.

[24]  Ultrasonic evaluation of geometrical and surface parameters of rough defects in solids , 1980 .