Multi-layer thin-film MCM-D for the realization of Q- and V-band functions

We report on the mm-wave performance of a multi-layer thin-film MCM-D technology with integrated passive components. The standard 50 /spl Omega/ CPW line exhibits a loss of -0.2 dB/mm at 60 GHz. A single CPW bridge (bend) has a return loss superior to -32 dB (-27 dB) up to 50 GHz with an insertion loss of -0.04 dB (-0.06 dB) at 50 GHz. A 30 GHz bandpass filter has achieved an insertion loss of -2.5dB over a 8% bandwidth with a return loss of -20 dB. A Q-band Wilkinson power divider has a return loss better than -15 dB from 31-48 GHz, isolation below -20 dB with an insertion loss of -3.5 dB. A quadrature coupler has a return loss better than -15 dB up to 60 GHz with an amplitude balance of 0.5 dB over the 38-60 GHz band, isolation of 20 dB, phase balance of (90+/-2)/spl deg/ and insertion loss of -4 dB.