论文信息 - Edge-Coupled Active and Passive Wafer-Scale Measurements on 300mm Silicon Photonics Wafers

Edge-Coupled Active and Passive Wafer-Scale Measurements on 300mm Silicon Photonics Wafers

We perform wafer-scale measurements of silicon photonics components using broadband (100nm+) edge couplers and reflecting optical fiber probes for the first time. We demonstrate <1dB/cm waveguide loss and 25GHz+ micro-ring modulators on 300mm wafers.

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