Comparative study of AlN dielectric films' electrical properties for MEMS capacitive switches
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E. Papandreou | Matroni Koutsoureli | George J. Papaioannou | George Konstantinidis | Loukas Michalas | Alexandros Georgakilas | G. Stavrinidis | G. Konstantinidis | M. Koutsoureli | G. Papaioannou | E. Papandreou | G. Stavrinidis | A. Adikimenakis | A. Adikimenakis | L. Michalas | A. Georgakilas
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