论文信息 - The Study of a Micro Channel Integrated Gas Flow Sensor - 字舞流文

The Study of a Micro Channel Integrated Gas Flow Sensor

Liu | Sheng | Yu | Xu | Bolin | Gan | Zhiyin | Jingping

[1] A.F.P. van Putten,et al. An integrated silicon double bridge anemometer , 1983 .

[2] Weileun Fang,et al. The development and application of microthermal sensors with a mesh-membrane supporting structure , 2000 .