Research of the Misalignments Compensation in Optical Systems Alignment

Computer-guided optical alignment technology requires adjustable lens, while such lens are rear for some optical systems due to structural limits. This essay focuses on using the compensation relations between misalignments to improve alignment accuracy. Firstly the influences from misalignments to wavefront error were researched and two-order compensation model of misalignments were built. Secondly, the essay developed an algorithm based on multi-fields merit function regression to calculate the misalignments of optical system, and the model was then simulated. Finally, practical alignment was tested. Result shows an increment of system MTF from 43% to 60% after the compensation process.