미세 패턴 자동 검사 시스템

In this paper, we propose a new automatic defect test system for a fine pattern COF (chip-on-film). The developed system detects automatically various defects of a COF with width of less than 24㎛ and pitch of less than 30㎛. The defects contain variety of defects such hard open, hard short, mouse bite (soft open) and near short (soft short). Basic principle for detecting these defects investigates voltage differences between defective and defect-free patterns using radio frequency resonator. This resonator amplifies this difference for the various cases. This approach based on an automatic detect test system can fairly save COF test costs as compared to conventional COF tests.