Typical Metrology of Micro-Hole Arrays Made in Stainless Steel Foils by Two-Stage Micro-EDM

Abstract Two-stage micro-EDM utilises one machine to fabricate electrodes and a second machine to manufacture holes. The diameter and taper of a hole are dependent on the accuracy of the electrode fabrication which has now been quantified. The accuracy of hole positioning has also been measured using commercial equipment in a novel application. The surface roughness and uniformity of the internal surfaces of the holes (typically 50 μm in diameter) have been examined using a novel method not involving cross-sectioning. Random surface microcracks appear to be metallurgy-dependent, not process related.