Optimizing anatase-TiO2 deposition for low-loss planar waveguides

Polycrystalline anatase-TiO2 thin film possesses desirable properties for on-chip photonic devices that can be used for optic computing, communication, and sensing. Low-loss anatase-TiO2 thin films are necessary for fabricating high quality optical devices. We studied anatase-TiO2 by reactively sputtering titanium metal in an oxygen environment and annealing. By correlating key deposition parameters, including oxygen flow rate, deposition pressure, RF power, and temperature to film morphology and planar waveguiding losses, we aim to understand the dominant source of propagation losses in TiO2 thin films and achieve higher quality, lower-loss films.

[1]  Hua Long,et al.  Third-order optical nonlinearities in anatase and rutile TiO2 thin films , 2009 .

[2]  Qing Yang,et al.  Direct coupling of plasmonic and photonic nanowires for hybrid nanophotonic components and circuits. , 2009, Nano letters.

[3]  Eric Mazur,et al.  Submicrometer-wide amorphous and polycrystalline anatase TiO2 waveguides for microphotonic devices. , 2012, Optics express.

[4]  M. Lipson,et al.  All-optical control of light on a silicon chip , 2004, Nature.

[5]  P. Tien.  Light waves in thin films and integrated optics. , 1971, Applied optics.

[6]  Henry I. Smith,et al.  Photonic-bandgap microcavities in optical waveguides , 1997, Nature.

[7]  Omri Raday,et al.  A hybrid AlGaInAs-silicon evanescent waveguide photodetector. , 2007, Optics express.

[8]  P. Hemmer,et al.  A diamond nanowire single-photon source. , 2009, Nature nanotechnology.

[9]  P. Sigmund.  Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets , 1969 .

[10]  Payne,et al.  Nonlinear refractive index of optical crystals. , 1989, Physical review. B, Condensed matter.

[11]  N. N. Greenwood,et al.  Chemistry of the elements , 1984 .

[12]  R. Hadfield.  Single-photon detectors for optical quantum information applications , 2009 .

[13]  F. Diederich,et al.  All-optical high-speed signal processing with silicon–organic hybrid slot waveguides , 2009 .

[14]  Fujio Izumi,et al.  Raman spectrum of anatase, TiO2 , 1978 .

[15]  Limin Tong,et al.  Subwavelength-diameter silica wires for low-loss optical wave guiding , 2003, Nature.

[16]  M. Smit,et al.  A fast low-power optical memory based on coupled micro-ring lasers , 2004, Nature.

[17]  Michal Lipson,et al.  Scalable 3D dense integration of photonics on bulk silicon. , 2011, Optics express.

[18]  Eric Mazur,et al.  Mixed two- and three-photon absorption in bulk rutile (TiO2) around 800 nm. , 2012, Optics express.