Method and appratus for sensing error operation of mass flow controller in semiconductor production device

The present invention relates to a flow regulator malfunction detection apparatus and method for detecting the malfunction state of the flow controller in the semiconductor manufacturing facility. The flow regulator of the semiconductor manufacturing system of the invention for preventing the wafer processing defects by detecting the malfunction of the flow controller (MFC) in a semiconductor manufacturing equipment malfunction detection device, the process chamber and the gas supply line and provided between the gas supply, the gas a digital pressure gauge and a setting to display is installed on the supply line to measure the pressure corresponding to the MFC, and the flow rate control by the MFC which controls the supply quantity and supply time of the gas supplied from the gas supply to the digital processing number storing the standard pressure value corresponding to the flow rate, and a database with an output to generate a flow control instruction to the MFC, and the flow rate, which receives the flow rate value to be controlled from the MFC stored in the database in response to the flow rate control command It is set by comparing the pressure value measured by the pressure control standard value and the digital pressure gauge When the car is out of range and a controller for outputting an alarm control signal. The present invention therefore, if out of range of the pressure value in comparison with a preset pressure by sensing the pressure set in advance corresponding to the flow rate control by the MFC in the semiconductor manufacturing facilities is determined by the MFC fail to trigger an alarm, to the MFC Fail and reduce costs by ensuring due process to prevent errors in advance. Gas flow, MFC, gas pressure, gas line, the flow control