A three-dimensional electret-based micro power generator for low-level ambient vibrational energy harvesting

A novel three-dimensional (3D) electret-based micro power generator with multiple vibration modes has been developed, which is capable of converting low-level ambient kinetic energy to electrical energy. The device is based on a rotational symmetrical resonator which consists of a movable disc-shaped seismic mass suspended by three sets of spiral springs. Experimental analysis shows that the proposed generator operates at an out-of-plane direction at mode I of 66 Hz and two in-plane directions at mode II of 75 Hz and mode III of 78.5 Hz with a phase difference of about 90°. A corona localized charging method is also proposed that employs a shadow mask and multiple discharge needles for the production of micro-sized electret array. From tests conducted at an acceleration of 0.05 g, the prototype can generate a maximum power of 4.8 nW, 0.67 nW and 1.2 nW at vibration modes of I, II and III, respectively. These values correspond to the normalized power densities of 16 µW cm−3 g−2, 2.2 µW cm−3 g−2 and 4 µW cm−3 g−2, respectively. The results show that the generator can potentially offer an intriguing alternative for scavenging low-level ambient energy from 3D vibration sources.

[1]  Yaowen Yang,et al.  A multiple-degree-of-freedom piezoelectric energy harvesting model , 2012 .

[2]  Tuna Balkan,et al.  An electromagnetic micro power generator for wideband environmental vibrations , 2008 .

[3]  Dimitri Galayko,et al.  A batch-fabricated and electret-free silicon electrostatic vibration energy harvester , 2009 .

[4]  Takafumi Suzuki,et al.  The advantages and potential of electret‐based vibration‐driven micro energy harvesters , 2009 .

[5]  Bernard H. Stark,et al.  Mems inertial power generators for biomedical applications , 2006 .

[6]  Nobuhide Kasagi,et al.  Large-amplitude MEMS electret generator with nonlinear spring , 2010, 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS).

[7]  Saibal Roy,et al.  A micro electromagnetic generator for vibration energy harvesting , 2007 .

[8]  Chengkuo Lee,et al.  Electromagnetic energy harvesting from vibrations of multiple frequencies , 2009 .

[9]  Helmut Seidel,et al.  Power MEMS—A capacitive vibration-to-electrical energy converter with built-in voltage , 2008 .

[10]  Jaehwan Kim,et al.  A review of piezoelectric energy harvesting based on vibration , 2011 .

[11]  Yi Chiu,et al.  Flat and robust out-of-plane vibrational electret energy harvester , 2012 .

[12]  Chengkuo Lee,et al.  A new energy harvester design for high power output at low frequencies , 2013 .

[13]  Paul K. Wright,et al.  A STUDY OF AMBIENT VIBRATIONS FOR PIEZOELECTRIC ENERGY CONVERSION , 2009 .

[14]  Y. Wang,et al.  Fully integrated micro electromagnetic vibration energy harvesters with micro-patterning of bonded magnets , 2012, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).

[15]  Chao Wang,et al.  Analytical characterization using surface-enhanced Raman scattering (SERS) and microfluidic sampling , 2015, Nanotechnology.

[16]  E. A. Baum,et al.  The lateral motion of charge on thin films of polyethylene terephthalate , 1978 .

[17]  Hyung-Jo Jung,et al.  Broadband energy-harvesting using a two degree-of-freedom vibrating body , 2011 .

[18]  Yiannos Manoli,et al.  Analysis and characterization of triangular electrode structures for electrostatic energy harvesting , 2011 .

[19]  Nobuhide Kasagi,et al.  High-Performance Polymer Electret for Micro Seismic Generator , 2005 .

[20]  S. W. Lye,et al.  Sandwich structured electrostatic/electrets parallel-plate power generator for low acceleration and low frequency vibration energy harvesting , 2012, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).

[21]  S. Beeby,et al.  Energy harvesting vibration sources for microsystems applications , 2006 .

[22]  Duy Son Nguyen,et al.  Nonlinear Behavior of an Electrostatic Energy Harvester Under Wide- and Narrowband Excitation , 2010, Journal of Microelectromechanical Systems.

[23]  Chengkuo Lee,et al.  A MEMS rotary comb mechanism for harvesting the kinetic energy of planar vibrations , 2010 .

[24]  M. Khalil.  The role of BaTiO/sub 3/ in modifying the dc breakdown strength of LDPE , 2000 .

[25]  Eric M. Yeatman,et al.  Wideband excitation of an electrostatic vibration energy harvester with power-extracting end-stops , 2013 .

[26]  Shih-Ming Yang,et al.  Development of a low frequency electrostatic comb-drive energy harvester compatible to SoC design by CMOS process , 2011 .

[27]  S. Boisseau,et al.  Cantilever-based electret energy harvesters , 2011 .

[28]  Timothy C. Green,et al.  Energy Harvesting From Human and Machine Motion for Wireless Electronic Devices , 2008, Proceedings of the IEEE.

[29]  Mehmet Rasit Yuce,et al.  A 2-DOF MEMS Ultrasonic Energy Harvester , 2011, IEEE Sensors Journal.

[30]  Oliver Paul,et al.  Low-frequency two-dimensional resonators for vibrational micro energy harvesting , 2010 .

[31]  Christiane Thielemann,et al.  Silicon-based inorganic electrets for application in micromachined devices , 1996 .

[32]  D.P. Arnold,et al.  Review of Microscale Magnetic Power Generation , 2007, IEEE Transactions on Magnetics.

[33]  Tao Dong,et al.  Modeling and experimental verification of low-frequency MEMS energy harvesting from ambient vibrations , 2011 .

[34]  N. Kasagi,et al.  Seismic Power Generator Using High-Performance Polymer Electret , 2006, 19th IEEE International Conference on Micro Electro Mechanical Systems.

[35]  Chengkuo Lee,et al.  Feasibility study of a 3D vibration-driven electromagnetic MEMS energy harvester with multiple vibration modes , 2012 .

[36]  Hiroshi Sameshima,et al.  Power output enhancement of a vibration-driven electret generator for wireless sensor applications , 2011 .

[37]  Henry A. Sodano,et al.  A review of power harvesting using piezoelectric materials (2003–2006) , 2007 .

[38]  R. B. Yates,et al.  Analysis Of A Micro-electric Generator For Microsystems , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[39]  Fei Wang,et al.  An electret-based energy harvesting device with a wafer-level fabrication process , 2013 .

[40]  Yuji Suzuki,et al.  Recent progress in MEMS electret generator for energy harvesting , 2011 .

[41]  Yuji Suzuki,et al.  Suspended electrodes for reducing parasitic capacitance in electret energy harvesters , 2013 .

[42]  D. Elata,et al.  On the quality of quality-factor in gap-closing electrostatic resonators , 2013 .

[43]  Yoshiaki Minakawa,et al.  X-shaped-spring enhanced MEMS electret generator for energy harvesting , 2013, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).