论文信息 - Arrayed ultrasonic microsensors with high directivity for in-air use using PZT thin film on silicon diaphragms ☆ - 字舞流文

Arrayed ultrasonic microsensors with high directivity for in-air use using PZT thin film on silicon diaphragms ☆

Seiji Aoyagi | Masanori Okuyama | Kaoru Yamashita | Hiromi Miyoshi | M. Okuyama | K. Yamashita | S. Aoyagi | H. Miyoshi | Yoshihiko Suzuki | Hiroshi Katata | Genro Kato | Yoshihiko Suzuki | H. Katata | G. Kato

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