Laser Microchemistry For Direct Writing Of Microstructures
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Microscopic laser-initiated chemical reactions can be used to write micrometer-scale features on materials of interest for solid-state electronics. In this paper, we describe the nature of direct-write-type fabrication and summarize the laser techniques which have been developed.
[1] R. M. Osgood,et al. Laser Microchemistry and its Application to Electron-Device Fabrication , 1983 .