论文信息 - Mechanical behavior related to various bonding states in amorphous Si–C–N hard films - 字舞流文

Mechanical behavior related to various bonding states in amorphous Si–C–N hard films

T. Staedler | N. Huang | Xin Jiang | C. Zhuang | M. Vogel | Regina Fuchs | Christoph Schlemper | Lei Zhang | R. Fuchs