Charging of Macroparticles in a Pulsed Vacuum Arc Discharge

A pulsed vacuum arc discharge emits a plasma as well as macroparticles (MPs) in the form of micrometer-sized molten droplets of cathode material. Due to their direction of flight and submicrometer to 100-mum diameter, these MPs often pose a contamination threat for both spacecraft-based thrusters and thin-film deposition systems. The velocity, mass, and charge of copper MPs emitted by a 100-A arc was experimentally measured and compared to a model based on thermionic electron emission. The MP velocity was determined by using a time-of-flight velocity filter. The charge was calculated by measuring particle deflection in a transverse electric field. The model predicts, and the experimental results verify, that the charge on the MPs becomes positive once the plasma is extinguished, and the MP travels in a vacuum, as would occur in a pulsed vacuum arc, versus a dc arc. Experimental results show a roughly quadratic dependence of particle charge on the particle diameter (q ~ D2), with a 1-mum particle having a positive charge of ~1000 electronic charges (1.6 times 10-16 C), and a 5-mum particle having a charge of ~25 000 electronic charges. The model is particle temperature dependent, and gives q ~ D2 at 1750 K and q ~ D1.7 at 2200 K. Arguments are also made for limitations on particle temperature due to radiative and evaporative cooling.

[1]  P. Siemroth,et al.  Investigations of the Current Density in the Cathode Spot of a Vacuum Arc , 1985 .

[2]  Don W. Green,et al.  Perry's chemical engineers' handbook. 7th ed. , 1997 .

[3]  Abdullah Al Mamun,et al.  Introduction to Dusty Plasma Physics , 2001 .

[4]  André Anders,et al.  Ion flux from vacuum arc cathode spots in the absence and presence of a magnetic field , 2002 .

[5]  D. A. Dunnett Classical Electrodynamics , 2020, Nature.

[6]  E. Mitchell,et al.  The work functions of copper, silver and aluminium , 1951, Proceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences.

[7]  Jochen Schein,et al.  Microvacuum Arc Thruster Design for a Cubesat Class Satellite , 2002 .

[8]  C. W. Kimblin,et al.  Erosion and ionization in the cathode spot regions of vacuum arcs , 1973 .

[9]  M. Keidar,et al.  Nonstationary macroparticle charging in an arc plasma jet , 1995 .

[10]  S. Quality Surface Quality , 2018, Materials Science and Technology of Optical Fabrication.

[11]  G. Pottlacher,et al.  Liquid-phase behaviour of normal spectral emissivity at 684.5 nm of some selected metals , 2002 .

[12]  G. V. Chester,et al.  Solid State Physics , 2000 .

[13]  B. Juttner Formation time and heating mechanism of arc cathode craters in vacuum , 1981 .

[14]  K. Nagata,et al.  Discontinuity in normal spectral emissivity of solid and liquid copper at the melting point , 1997 .

[15]  C. A. Busse,et al.  The vapor pressure of indium, silver, gallium, copper, tin, and gold between 0.1 and 3.0 bar , 1987 .

[16]  J. Daalder Components of cathode erosion in vacuum arcs , 1976 .

[17]  M. Keidar,et al.  Macroparticle Charging in a Pulsed Vacuum Arc Thruster Discharge , 2006 .

[18]  Michael Keidar,et al.  Influence of an electrical field on the macroparticle size distribution in a vacuum arc , 1999 .

[19]  Isak I. Beilis,et al.  State of the theory of vacuum arcs , 2001 .

[20]  M. Keidar,et al.  Macroparticle distribution in a quarter-torus plasma duct of a filtered vacuum arc deposition system , 1997 .

[21]  M. Madou Fundamentals of microfabrication , 1997 .

[22]  Michael Keidar,et al.  Magnetically enhanced vacuum arc thruster , 2005 .

[23]  M. Sodha THERMIONIC EMISSION FROM SPHERICAL METALLIC PARTICLES , 1961 .

[24]  B. Djakov,et al.  Cathode spot division in vacuum arcs with solid metal cathodes , 1971 .

[25]  C. J. Smithells,et al.  Metals reference book , 1949 .

[26]  A. Anders,et al.  Efficient, compact power supply for repetitively pulsed, “triggerless” cathodic arcs , 1999 .

[27]  R. Boxman Early history of vacuum arc deposition , 2001 .

[28]  D. K. Davies,et al.  Erosion products from the cathode spot region of a copper vacuum arc , 1978 .

[29]  L. Swanson,et al.  Recent Advances in Field Electron Microscopy of Metals , 1973 .

[30]  M. Brereton Classical Electrodynamics (2nd edn) , 1976 .

[31]  R. Bautista,et al.  The normal spectral emissivity measurements on liquid copper , 1979 .

[32]  G. W. McClure,et al.  Plasma expansion as a cause of metal displacement in vacuum‐arc cathode spots , 1974 .

[33]  R. Millikan,et al.  Modern Physics , 1926, Nature.

[34]  M. Madou Fundamentals of microfabrication : the science of miniaturization , 2002 .

[35]  K. Nagata,et al.  Measurement of Normal Spectral Emissivity of Liquid Copper , 1997 .

[36]  Philip J. Martin,et al.  Handbook of vacuum arc science and technology : fundamentals and applications , 1995 .

[37]  Kevin Barraclough,et al.  I and i , 2001, BMJ : British Medical Journal.

[38]  S. Shalev,et al.  Velocities and emission rates of cathode‐produced molybdenum macroparticles in a vacuum arc , 1985 .

[39]  E. Hantzsche,et al.  Mysteries of the arc cathode spot: A retrospective glance , 2003 .

[40]  M. Keidar,et al.  Transport of macroparticles in magnetized plasma ducts , 1996 .

[41]  M. Keidar,et al.  Macroparticle interaction with a substrate in cathodic vacuum arc deposition , 1996 .

[42]  A. Anders,et al.  Pulsed vacuum-arc ion source operated with a “triggerless” arc initiation method , 2000 .

[43]  S. Goldsmith,et al.  Principles and applications of vacuum arc coatings , 1989 .

[44]  John Ziemer,et al.  Thrust Improvement of the Magnetically Enhanced Vacuum Arc Thruster (MVAT) , 2005 .

[45]  M. Sodha,et al.  Physics of Colloidal Plasmas , 1971 .

[46]  Jochen Schein,et al.  Compact vacuum arc micro-thruster for small satellite systems , 2001 .

[47]  S. Shalev,et al.  Macroparticle Dynamics during Multi-Cathode-Spot Vacuum Arcs , 1986, IEEE Transactions on Plasma Science.

[48]  A. Anders,et al.  On modes of arc cathode operation , 1991 .

[49]  S. Goldsmith,et al.  The interaction between plasma and macroparticles in a multi‐cathode‐spot vacuum arc , 1981 .

[50]  A. Anders,et al.  `Triggerless' triggering of vacuum arcs , 1998 .

[51]  Jochen Schein,et al.  Inductive energy storage driven vacuum arc thruster , 2002 .

[52]  M Rosenberg,et al.  Attractive potential around a thermionically emitting microparticle. , 2004, Physical review letters.

[53]  Don W. Green,et al.  Perry's Chemical Engineers' Handbook , 2007 .

[54]  E. Hantzsche Theory of the expanding plasma of vacuum arcs , 1991 .

[55]  B. Juttner,et al.  Current Density in Arc Spots , 1985, IEEE Transactions on Plasma Science.