Hertz-linewidth and frequency-agile photonic integrated extended-DBR lasers

Recent advances in the development of ultra-low loss silicon nitride (Si3N4)-based photonic integrated circuits have allowed integrated lasers to achieve a coherence exceeding those of fiber lasers and enabled unprecedentedly fast (Megahertz bandwidth) tuning using monolithically integrated piezoelectrical actuators. While this marks the first time that fiber laser coherence is achieved using photonic integrated circuits, in conjunction with frequency agility that exceeds those of legacy bulk lasers, the approach is presently compounded by the high cost of manufacturing DFB, as required for self-injection locking, as well as the precise control over the laser current and temperature to sustain a low noise locked operation. Reflective semiconductor optical amplifiers (RSOA) provide a cost-effective alternative solution but have not yet achieved similar performance in coherence or frequency agility, as required for frequency modulated continuous wave (FMCW) LiDAR, laser locking in frequency metrology or wavelength modulation spectroscopy for gas sensing. Here, we overcome this challenge and demonstrate an RSOA-based and frequency agile integrated laser tuned with high speed, good linearity, high optical output power, and turn-key operability while maintaining a small footprint. This is achieved using a tunable extended distributed Bragg reflector (E-DBR) in an ultra-low loss 200 nm thin Si3N4 platform with monolithically integrated piezoelectric actuators. We co-integrate the DBR with a compact ultra-low loss spiral resonator to further reduce the intrinsic optical linewidth of the laser to the Hertz level -- on par with the noise of a fiber laser -- via self-injection locking.

[1]  T. Kippenberg,et al.  A fully hybrid integrated erbium-based laser , 2023, Nature Photonics.

[2]  T. Kippenberg,et al.  Low-noise frequency-agile photonic integrated lasers for coherent ranging , 2022, Nature Communications.

[3]  T. Kippenberg,et al.  A photonic integrated circuit–based erbium-doped amplifier , 2022, Science.

[4]  P. Rakich,et al.  Chip-based laser with 1-hertz integrated linewidth , 2022, Science advances.

[5]  A. Leinse,et al.  Ultra-low power stress-based phase actuation in TriPleX photonic circuits , 2022, OPTO.

[6]  P. Andrekson,et al.  Ultralow-loss Silicon Nitride Waveguides for Parametric Amplification , 2022, 2022 Optical Fiber Communications Conference and Exhibition (OFC).

[7]  T. Kippenberg,et al.  Near ultraviolet photonic integrated lasers based on silicon nitride , 2021, APL Photonics.

[8]  K. Vahala,et al.  Reaching fiber-laser coherence in integrated photonics. , 2021, Optics letters.

[9]  T. Kippenberg,et al.  A photonic integrated continuous-travelling-wave parametric amplifier , 2021, Nature.

[10]  N. J. Engelsen,et al.  High-yield, wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits , 2021, 2021 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC).

[11]  T. Kippenberg,et al.  Actuation bandwidth extension of an integrated piezo-optomechanical nanophotonic device , 2021, Conference on Lasers and Electro-Optics.

[12]  K. Vahala,et al.  High-performance lasers for fully integrated silicon nitride photonics , 2021, Nature Communications.

[13]  T. Kippenberg,et al.  Magnetic-free silicon nitride integrated optical isolator , 2021, Nature Photonics.

[14]  P. Rakich,et al.  422 Million intrinsic quality factor planar integrated all-waveguide resonator with sub-MHz linewidth , 2021, Nature Communications.

[15]  T. Monz,et al.  Compact Ion-Trap Quantum Computing Demonstrator , 2021, PRX Quantum.

[16]  K. Vahala,et al.  Hertz-linewidth semiconductor lasers using CMOS-ready ultra-high-Q microresonators , 2020, Nature Photonics.

[17]  N. J. Engelsen,et al.  High-yield, wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits , 2020, Nature Communications.

[18]  Erwan Lucas,et al.  Massively parallel coherent laser ranging using a soliton microcomb , 2019, Nature.

[19]  T. Kippenberg,et al.  Monolithic piezoelectric control of soliton microcombs , 2019, Nature.

[20]  J. Bowers,et al.  Tutorial on narrow linewidth tunable semiconductor lasers using Si/III-V heterogeneous integration , 2019, APL Photonics.

[21]  J. Bowers,et al.  Ultra-narrow linewidth laser based on a semiconductor gain chip and extended Si3N4 Bragg grating. , 2019, Optics letters.

[22]  T. Kippenberg,et al.  Hybrid integrated photonics using bulk acoustic resonators , 2019, Nature Communications.

[23]  J. Bowers,et al.  High-power sub-kHz linewidth lasers fully integrated on silicon , 2019, Optica.

[24]  T. Kippenberg,et al.  PORT: A piezoelectric optical resonance tuner , 2019, 2018 IEEE Micro Electro Mechanical Systems (MEMS).

[25]  M. Gorodetsky,et al.  Spectrum collapse, narrow linewidth, and Bogatov effect in diode lasers locked to high-Q optical microresonators. , 2018, Optics express.

[26]  Yang Liu,et al.  Widely-tunable, narrow-linewidth III-V/silicon hybrid external-cavity laser for coherent communication. , 2018, Optics express.

[27]  Sudharsanan Srinivasan,et al.  Low kappa, narrow bandwidth Si(3)N(4) Bragg gratings. , 2015, Optics express.

[28]  John E. Bowers,et al.  Integrated microwave photonics , 2015, 2015 International Topical Meeting on Microwave Photonics (MWP).

[29]  D. Blumenthal,et al.  Erbium-doped waveguide DBR and DFB laser arrays integrated within an ultra-low-loss Si3N4 platform. , 2014, Optics express.

[30]  Tong Chen,et al.  A general design algorithm for low optical loss adiabatic connections in waveguides. , 2012, Optics express.

[31]  A. Ludlow,et al.  Making optical atomic clocks more stable with 10-16-level laser stabilization , 2011, 1101.1351.

[32]  A. Matsko,et al.  Whispering-gallery-mode-resonator-based ultranarrow linewidth external-cavity semiconductor laser. , 2010, Optics letters.

[33]  Alan J. Rogers,et al.  Distributed optical-fibre sensing , 1999 .

[34]  Daniel T. Cassidy,et al.  Atmospheric pressure monitoring of trace gases using tunable diode lasers. , 1982, Applied optics.

[35]  Ming C. Wu,et al.  Electronic-Photonic Integrated Circuit for 3D Microimaging , 2017, IEEE Journal of Solid-State Circuits.

[36]  Xu Wang,et al.  Silicon photonic waveguide Bragg gratings , 2013 .

[37]  W. Marsden I and J , 2012 .