Real-time high-resolution topographic imagery using interference microscopy
暂无分享,去创建一个
P. C. Montgomery | Y. Reibel | L. Vabre | Arnaud Dubois | Albert Claude Boccara | B. Cunin | C. Draman | A. Boccara | A. Dubois | B. Cunin | P. Montgomery | L. Vabre | Y. Reibel | C. Draman | Laurent Vabre
[1] Kenneth D. Stumpf. Real-Time Interferometer , 1979 .
[2] A C Boccara,et al. Phase measurements with wide-aperture interferometers. , 2000, Applied optics.
[3] J. Wyant. Use of an ac heterodyne lateral shear interferometer with real-time wavefront correction systems. , 1975, Applied optics.
[4] O. Sasaki,et al. Sinusoidal phase modulating interferometry for surface profile measurement. , 1986, Applied optics.
[5] C. Sheppard,et al. Effect of numerical aperture on interference fringe spacing. , 1995, Applied optics.
[6] P. Montgomery,et al. Photoetching effects in mercuric iodide , 2000 .
[7] T C Strand,et al. Profilometry with a coherence scanning microscope. , 1990, Applied optics.
[8] P Sandoz,et al. Wavelet transform as a processing tool in white-light interferometry. , 1997, Optics letters.
[9] H Mykura,et al. Errors in surface topography measurements with high aperture interference microscopes , 1963 .
[10] A C Boccara,et al. Real-time reflectivity and topography imagery of depth-resolved microscopic surfaces. , 1999, Optics letters.
[11] Kieran G. Larkin,et al. Efficient nonlinear algorithm for envelope detection in white light interferometry , 1996 .
[12] C. Sheppard,et al. Imaging in high-aperture optical systems , 1987 .
[13] Paul C. Montgomery,et al. Peak fringe scanning microscopy: submicron 3D measurement of semiconductor components , 1993, Optics & Photonics.
[14] A. Dubois,et al. Phase-map measurements by interferometry with sinusoidal phase modulation and four integrating buckets. , 2001, Journal of the Optical Society of America. A, Optics, image science, and vision.
[15] Manuel Flury,et al. Rapid prototyping of diffractive optical elements for high-power lasers using laser ablation lithography fabrication and coherence probe microscopy analysis , 2002 .
[16] 325-nm Interference Microscope. , 1998, Applied optics.
[17] C. Bruce,et al. Obliquity effects in interference microscopes , 1957 .
[18] Leslie L. Deck,et al. Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain , 1995 .
[19] K. Creath. V Phase-Measurement Interferometry Techniques , 1988 .
[20] Kieran G. Larkin,et al. Design and assessment of symmetrical phase-shifting algorithms , 1992 .
[21] K E Elssner,et al. Errors in phase-measurement interferometry with high numerical apertures. , 1991, Applied optics.
[22] J C Wyant,et al. Absolute measurement of surface roughness. , 1990, Applied optics.
[23] J. Schwider,et al. New compensating four-phase algorithm for phase-shift interferometry , 1993 .
[24] K. Creath. Step height measurement using two-wavelength phase-shifting interferometry. , 1987, Applied optics.
[25] J. Schwider,et al. IV Advanced Evaluation Techniques in Interferometry , 1990 .
[26] B. Bhushan,et al. Measurement of surface topography of magnetic tapes by Mirau interferometry. , 1985, Applied optics.
[27] P. Groot. Extending the unambiguous range of two-color interferometers , 1994 .
[28] T. Doi,et al. Effects of phase changes on reflection and their wavelength dependence in optical profilometry. , 1997, Applied optics.
[29] Y Surrel,et al. Design of algorithms for phase measurements by the use of phase stepping. , 1996, Applied optics.
[30] Bing Zhao,et al. Phase shifting: six-sample self-calibrating algorithm insensitive to the second harmonic in the fringe signal , 1995 .
[31] P. J. Caber. Interferometric profiler for rough surfaces. , 1993, Applied optics.
[32] K Creath,et al. Extended averaging technique for derivation of error-compensating algorithms in phase-shifting interferometry. , 1995, Applied optics.
[33] G S Kino,et al. Phase measurements using the Mirau correlation microscope. , 1991, Applied optics.
[34] J. Biegen,et al. Calibration requirements for Mirau and Linnik microscope interferometers. , 1989, Applied optics.
[35] Y. Surrel. Phase stepping: a new self-calibrating algorithm. , 1993, Applied optics.
[36] Y. Y. Cheng,et al. Optical generation of a circular harmonic filter for rotation and translation invariant optical pattern recognition. , 1987, Applied optics.
[37] Peter de Groot,et al. Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window. , 1995, Applied optics.
[38] O. Sasaki,et al. Sinusoidal phase modulating interferometer using the integrating-bucket method. , 1987, Applied optics.
[39] Mark P. Davidson,et al. An Application Of Interference Microscopy To Integrated Circuit Inspection And Metrology , 1987, Advanced Lithography.
[40] S S Chim,et al. Three-dimensional image realization in interference microscopy. , 1992, Applied optics.
[41] Dennis C. Ghiglia,et al. Two-Dimensional Phase Unwrapping: Theory, Algorithms, and Software , 1998 .
[42] G S Kino,et al. Mirau correlation microscope. , 1990, Applied optics.
[43] T. Eiju,et al. Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm. , 1987, Applied optics.