论文信息 - Diffusion and Defect Structure in Nitrogen Implanted Silicon - 字舞流文

Diffusion and Defect Structure in Nitrogen Implanted Silicon

A. Domenicucci | M. Khare | P. Ronsheim | O. Dokumaci | Jinghong Li | M. Law | R. Kaplan | J. Burnham | R. Fleming | L. S. Adam