论文信息 - A High-sensitivity, Small-size Resonant Pressure Microsensor Based on Optimized Resonator-diaphragm Structure

A High-sensitivity, Small-size Resonant Pressure Microsensor Based on Optimized Resonator-diaphragm Structure

This paper presents a high-sensitivity, small-size resonant pressure microsensor based on optimized resonator-diaphragm structure. The proposed microsensor adopt two double-ended tuning fork resonators using electrostatic excitation/piezoresistive detection as sensing elements, where the resonant frequencies of the resonators increase and decrease respectively under the pressure applied on the pressure sensitive diaphragm. The developed microsensor was fabricated based on a simplified SOI-MEMS technology. Experimental results indicate that the presented microsensor produces a high differential sensitivity of 110 Hz/kPa, high differential linearity dependent coefficient of 0.999999 and quality factors of 8,000.

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