Highly manufacturable sub-100 nm DRAM integrated with full functionality
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J.K. Cho | J.J. Lee | S. Choi | K. Fujihara | B.H. Kim | D.C. Kim | Y.S. Kim | J.-H. Ku | U.I. Chung | B.Y. Nam | S.H. Lee | J.W. Lee | J.D. Ryu | S.J. Heo | S.P. Yoon | C.J. Choi | Y.J. Lee | J.H. Chung | M.B. Lee | G.H. Choi | J.T. Moon