Microfabrication of a high pressure bipropellant rocket engine
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S. Spearing | A. Epstein | A. Ayón | J. Kerrebrock | A. London | T. S. Harrison | Y. Peles
[1] G. Schwartz,et al. Reactive ion etching of silicon , 1979 .
[2] W. Kern. The Evolution of Silicon Wafer Cleaning Technology , 1990 .
[3] S. D. Senturia,et al. Macro Power from Micro Machinery , 1997, Science.
[4] J. O. Mur-Miranda,et al. Power MEMS and microengines , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
[5] Kuo-Shen Chen. Materials characterization and structural design of ceramic micro turbomachinery , 1998 .
[6] U. Gösele,et al. Semiconductor wafer bonding , 1998 .
[7] Martin A. Schmidt,et al. Deep reactive ion etching of silicon , 1998 .
[8] Martin A. Schmidt,et al. Influence of Coil Power on the Etching Characteristics in a High Density Plasma Etcher , 1999 .
[9] A. A. Ayon,et al. Silicon wafer bonding for MEMS manufacturing , 1999 .
[10] Fly me to the Stars , 1999 .
[11] M. Schmidt,et al. Characterization of a Time Multiplexed Inductively Coupled Plasma Etcher , 1999 .
[12] M. Schmidt,et al. Microfabrication of high-temperature silicon devices using wafer bonding and deep reactive ion etching , 1999 .
[13] S. Spearing,et al. Controlling and Testing the Fracture Strength of Silicon on the Mesoscale , 2000 .
[14] Adam Pollok London. Development and test of a microfabricated bipropellant rocket engine , 2000 .
[15] Alan H. Epstein,et al. High-Pressure Bipropellant Microrocket Engine , 2001 .