Design and Implementation of New Sensors and Their Integration in Joints

Taking full advantage of the structural capabilities of parallel kinematics demands additional machine-oriented control tasks, e.g. self-calibration and workspace monitoring. A promising strategy to simplify the corresponding algorithms is the integration of lightweight angular position sensors in passive joints. Due to the rough environment, contactless working sensors are required. In this section, two different inductive sensors manufactured by means of microtechnology are presented. The incremental sensor consists of microcoils, whose inductance changes during the rotation of a microscale on the joint shaft. The absolute sensor combines a vectorial magnetometer with a permanent magnet changing its magnetic orientation during joint movement.

[1]  Pavel Ripka,et al.  Review of fluxgate sensors , 1992 .

[2]  Fritz Primdahl,et al.  Demagnetising factor and noise in the fluxgate ring-core sensor , 1989 .

[3]  Juergen Hesselbach,et al.  Passive-joint sensors for parallel robots , 2005 .

[4]  S. Buttgenbach,et al.  A novel angular joint-sensor using a fluxgate magnetometer , 2005, IEEE Sensors, 2005..

[5]  David Inkermann,et al.  Passive and Adaptive Joints for Parallel Robots , 2011, Robotic Systems for Handling and Assembly.

[6]  S. Büttgenbach,et al.  Technology and application of electro-depositable photo resists to create uniform coatings needed for complex 3D micro actuators and sensors , 2007 .

[7]  F. Primdahl.  The fluxgate magnetometer , 1979 .

[8]  Stephanus Büttgenbach,et al.  Passive joint-sensor applications for parallel robots , 2004, 2004 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS) (IEEE Cat. No.04CH37566).

[9]  Stephanus Büttgenbach,et al.  Revised fabrication process for micro-fluxgate-magnetometers , 2008 .

[10]  S. Büttgenbach,et al.  Design, fabrication and characterization of a micro-fluxgate intended for parallel robot application , 2009, Microtechnologies.

[11]  A. Wogersien,et al.  Novel inductive eddy current sensor for angle measurement , 2003, Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498).

[12]  Stephanus Büttgenbach,et al.  Simulation tool for proximity effects in high aspect ratio UV-lithographic patterning , 2008 .

[13]  Stephanus Büttgenbach,et al.  MEMS fluxgate magnetometer for parallel robot application , 2010 .

[14]  Pavel Ripka,et al.  Advances in fluxgate sensors , 2003 .

[15]  J. Hesselbach,et al.  HEXA-parallel-structure calibration by means of angular passive joint sensors , 2005, IEEE International Conference Mechatronics and Automation, 2005.

[16]  Stephanus Büttgenbach,et al.  Application of UV depth lithography in micro system technology , 2008 .

[17]  Annika Raatz,et al.  Parallel Kinematic Structures of the SFB 562 , 2011, Robotic Systems for Handling and Assembly.

[18]  Daniel Schütz,et al.  Robotic Systems for Handling and Assembly , 2011, Robotic Systems for Handling and Assembly.

[19]  C. Boese,et al.  Innovative High-Precision Position Sensor Systems for Robotic and Automotive Applications , 2009 .

[20]  S. Buttgenbach,et al.  New generation of integrated position sensor systems for parallel robotic applications , 2009, 2009 IEEE Sensors.

[21]  Marco Feldmann.  Technologien und Applikationen der UV-Tiefenlithographie: Mikroaktorik, Mikrosensorik und Mikrofluidik , 2007 .