论文信息 - BEOL Integrated Ferroelectric HfO₂-Based Capacitors for FeRAM: Extrapolation of Reliability Performance to Use Conditions - 字舞流文

BEOL Integrated Ferroelectric HfO₂-Based Capacitors for FeRAM: Extrapolation of Reliability Performance to Use Conditions

C. Carabasse | T. Mikolajick | F. Andrieu | U. Schroeder | J. Coignus | L. Grenouillet | N. Vaxelaire | M. Materano | P. Lomenzo | T. Francois | S. Chevalliez | R. Alcala