Infinite Dimension Modeling of a Novel Microforce Sensor and the Application in Micromanipulation

To accurately measure the micro interactive force (For example, adhesion, surface tension, friction, and assembly force) acting on micro devices during micro/nano manipulation, a novel micro force sensor that can reliably measure force in the range of sub-micro-Newton (μN) is designed and developed in this paper. During the application of this micro force sensor in micro/nano manipulation, the accuracy of this sensor’s model is quite important to the force control of the system. Therefore, the accurate infinite dimension model of the micro force sensor and micro manipulator is built up. Based on the infinite dimension model, the impedance control system is designed. To verify the infinite dimension model and the control system, micromanipulation experiments are designed and realized. Experiment results verify the accuracy of the infinite dimension model of the sensor, and show the efficiency of the impedance control system. The developed micro force sensor and the infinite dimension modeling provide a feasible and versatile solution in micro force sensing and feedback force control for micro/nano manipulation, and will promote the technology of automating the micro/nano manipulation.

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