Dynamic simulation and analysis of planetary transmission of ultra-precision planar polishing machine

Planetary transmission of ultra-precision planar polishing has crucial effects on polishing path and quality. It studies the PE-1 style of ultra-precision double sided polishing machine. Combining with three-dimensional model in solidworks, the virtual prototype of the planetary transmission system is established based on ADAMS. The veracity of VP is validated by dynamic simulation. It analyses the relationships between the contact force changing and angular velocity. It provides advantage for further studies on mechanical polishing process