Master-slave synchronous position control for precision stages based on multirate control and dead-time compensation

A synchronous position control system based on master-slave method is often required in industrial equipment, for example, NC machine tools, exposure systems, and so on. The authors' research group has achieved precise positioning whose error tolerance is in sub-micrometer range for a large-scaled high-precision stage with perfect tracking control (PTC). In this paper, we propose a novel synchronous position control system for a pair of precision stages based on multirate control and dead-time compensation. Finally, simulations and experiments with experimental precision stages are performed to show the advantages of the proposed control system.