X-Ray Microprobe with a Pair of Elliptical Mirrors

A grazing-incidence mirror system for focusing X-rays has been developed. Two mirrors, each with an elliptical cylinder shape, are arranged in a crossed-mirror geometry (Kirkpatrick-Baez configuration) to form an X-ray source image that is demagnified by a factor of several hundred. A focused X-ray spot of 5.5 µm×4.2 µm was obtained at a wavelength of 2.0 A using synchrotron radiation from the KEK Photon Factory 2.5 GeV storage ring and was applied to scanning X-ray microscopy.