论文信息 - Enhancement of crystal anisotropy and ferroelectricity by decreasing thickness in (Al,Sc)N films - 字舞流文

Enhancement of crystal anisotropy and ferroelectricity by decreasing thickness in (Al,Sc)N films

H. Funakubo | Yoshitaka Ehara | S. Yasui | O. Sakata | Takao Shimizu | T. Shiraishi | M. Akiyama | Shinnosuke Yasuoka | M. Uehara | Hiroshi Yamada | Y. Imai | K. Nishida | R. Mizutani | Reika Ota