论文信息 - Developing High Sensitivity Biomass Sensor Using Lamé Mode Square Resonator

Developing High Sensitivity Biomass Sensor Using Lamé Mode Square Resonator

In this paper, a new cost-effective and reliable high performance biomass sensor is presented. Compared to previous biomass sensors, the developed sensor shows a potential to detect smaller biological agents by producing a high quality output signal at atmospheric pressure. The biomass sensor is a micro machined silicon squared plate that is excited in the Lamé bulk acoustic resonant mode at a frequency of 37.8 MHz, with quality factor of 10,000 and the mass sensitivity of -400 Hz/pg.

[1] Joachim Wegener,et al. The Quartz Crystal Microbalance in Cell Biology: Basics and Applications , 2006 .

[2] C. Steinem,et al. Piezoelectric Mass-Sensing Devices as Biosensors-An Alternative to Optical Biosensors? , 2000, Angewandte Chemie.

[3] M. Mehregany,et al. Microelectromechanical systems , 1993, IEEE Circuits and Devices Magazine.

[4] C. Nguyen,et al. A merged process for thick single-crystal Si resonators and BiCMOS circuitry , 1999 .

[5] Allan L. Smith,et al. Chapter 5 – The Quartz Crystal Microbalance , 2008 .

[6] Johannes D. Seelig,et al. Label-free protein assay based on a nanomechanical cantilever array , 2002 .

[7] J. Vörös,et al. Electrochemical Biosensors - Sensor Principles and Architectures , 2008, Sensors.

[8] Masayoshi Esashi,et al. High-frequency one-chip multichannel quartz crystal microbalance fabricated by deep RIE , 2003 .

[9] Niina J. Ronkainen,et al. Electrochemical biosensors. , 2010, Chemical Society reviews.

[10] C.T.-C. Nguyen,et al. 1.156-GHz self-aligned vibrating micromechanical disk resonator , 2004, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[11] Sheng-Shian Li,et al. Vibrating micromechanical resonators with solid dielectric capacitive transducer gaps , 2005, Proceedings of the 2005 IEEE International Frequency Control Symposium and Exposition, 2005..