Advanced simulation tool for the design of sensors and actuators

Abstract Sensors, actuators, and sensor-actuator systems are often based on the mutual interaction of physical fields, e.g., the mechanical field with the electromagnetic field. The accurate modeling of such transducers leads to so-called multi-field problems, which are described by a system of non-linear partial differential equations. These systems cannot be solved analytically and thus numerical calculation schemes have to be applied. Therewith, we have developed the simulation tool CFS++(Coupled Field Simulation in C++) based on the Finite Element (FE) method, which is capable of efficiently solving the arising partial differential equations. The program is applicable for simulating capacitive micromachined transducers, piezoelectric transducers, electromagnetic and magnetomechanical sensors and actuators. It also contains models for (aero-)acoustics and ultrasound transducers. Furthermore, we offer advanced material models including hysteretic behaviors.