论文信息 - In Situ Measurements of Hydrogen Flux, Surface Coverage, Incorporation and Desorption During Magnetron Sputter-Deposition of A-SI:H. - 字舞流文

In Situ Measurements of Hydrogen Flux, Surface Coverage, Incorporation and Desorption During Magnetron Sputter-Deposition of A-SI:H.

J. Abelson | L. Mandrell | D. Ruzic | M. Katiyar | A. Nuruddin | A. M. Myers | G. Feng | N. Maley | J. Doyle | M. Fitzner | Sang H. Yang

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