论文信息 - Plasma enhanced atomic layer deposition of textured aluminum nitride on platinized substrates for MEMS - 字舞流文

Plasma enhanced atomic layer deposition of textured aluminum nitride on platinized substrates for MEMS

J. Pulskamp | G. Rayner | G. Fox | J. Shallenberger | R. Rudy | W. Sarney | R. Benoit | T. J. Larrabee | Nicholas A. Strnad