A novel micro electric field sensor with X–Y dual axis sensitive differential structure

Abstract This paper presents a novel X – Y dual axis sensitive sensor for static electric field measurement. Compared with the existent electric field micro sensors, which can only detect one axial direction electric field, this sensor is capable of two-dimensional electric field sensing. In the design of the micro sensor, the combination of angular comb-drives and serpentine springs can bring the advantage of achieving large in-plane rotation, which enlarges the vibration amplitudes and results in more induced charges. Moreover, the push–pull electrostatic actuation method and the adopted differential sensing electrodes both can reduce the impact of common mode interference. Two pairs of sensing elements are located differentially to form a cross-like shape, with each pair to get X and Y component of the electric field respectively. Experimental results agree well with the electric field calibration theory and show high measurement accuracy. In the range from 0 to 25 kV/m, the errors of electric field value are better than 8%.

[1]  J. Yeh,et al.  Large rotation actuated by in-plane rotary comb-drives with serpentine spring suspension , 2005 .

[2]  K. L. Scott,et al.  Electrostatic charge and field sensors based on micromechanical resonators , 2003 .

[3]  C. Peng,et al.  Thermally driven micro-electrostatic fieldmeter , 2006 .

[4]  W. Winn,et al.  Electric field measurements in thunderclouds using instrumented rockets , 1971 .

[5]  Pengfei Yang,et al.  Detecting internal defect of non-ceramic insulators using a novel micromachined electric field sensor , 2011, 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.

[6]  Haiyan Zhang,et al.  A high sensitivity SOI electric-field sensor with novel comb-shaped microelectrodes , 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.

[7]  Lin Yuanhui,et al.  フォトレジスト上のパリレンC(POP):ポリマー/金属ナノワイヤ製造のための低温スペーサ技術 , 2011 .

[8]  Masayoshi Esashi,et al.  Micro wishbone interferometer for Fourier transform infrared spectrometry , 2011 .

[9]  Chengkuo Lee,et al.  A MEMS rotary comb mechanism for harvesting the kinetic energy of planar vibrations , 2010 .

[10]  D. JamesConrad,et al.  マイクロ流体デバイスにおいて誘電泳動と磁気泳動を使用した高い効率の磁気粒子集合化 | 文献情報 | J-GLOBAL 科学技術総合リンクセンター , 2010 .

[11]  R. Muller,et al.  Micromechanical electrostatic voltmeter , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

[12]  Bernd Folkmer,et al.  The silicon angular rate sensor system DAVED , 2000 .

[13]  Xianxiang Chen,et al.  Design and testing of a micromechanical resonant electrostatic field sensor , 2006 .

[14]  Richard J. Blakeslee,et al.  A Low Noise, Microprocessor-Controlled, Internally Digitizing Rotating-Vane Electric Field Mill for Airborne Platforms , 2007 .

[15]  Horacio Torres,et al.  On the lightning hazard warning using electrostatic field: Analysis of summer thunderstorms in Spain , 2009 .

[16]  S. Bedair,et al.  MEMS electric-field sensor with lead zirconate titanate (PZT)-actuated electrodes , 2013, 2013 IEEE SENSORS.

[17]  I. Kitamura,et al.  Development of the hybrid electric field meter for simultaneous measuring of vertical and horizontal electric fields of the thundercloud , 2006, IEEE Transactions on Electromagnetic Compatibility.

[18]  Feng-jie Zheng,et al.  Spatial Three Dimensional Electric Field Measuring System Basing on L-Band Meteorological Radar: Spatial Three Dimensional Electric Field Measuring System Basing on L-Band Meteorological Radar , 2013 .

[19]  R. Giles Harrison.  A balloon-carried electrometer for high-resolution atmospheric electric field measurements in clouds , 2001 .

[20]  Mark N. Horenstein,et al.  A micro-aperture electrostatic field mill based on MEMS technology , 2001 .

[21]  C. Shafai,et al.  Analysis and Design of a Micromachined Electric-Field Sensor , 2008, Journal of Microelectromechanical Systems.

[22]  T. Kobayashi,et al.  An electrostatic field sensor driven by self-excited vibration of sensor/actuator integrated piezoelectric micro cantilever , 2012, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).

[23]  K.H. Lundberg,et al.  A self-resonant MEMS-based electrostatic field sensor , 2006, 2006 American Control Conference.

[24]  Cheng-Hsien Liu,et al.  Rotary electrostatic micromirror switches using wafer-scale processing and assembly , 2006 .

[25]  Chengkuo Lee,et al.  MOEMS variable optical attenuators using rotary comb drive actuators , 2006, IEEE Photonics Technology Letters.