A miniaturised autonomous sensor based on nanowire materials platform: the SiNAPS mote

A micro-power energy harvesting system based on core(crystalline Si)-shell(amorphous Si) nanowire solar cells together with a nanowire-modified CMOS sensing platform have been developed to be used in a dust-sized autonomous chemical sensor node. The mote (SiNAPS) is augmented by low-power electronics for power management and sensor interfacing, on a chip area of 0.25mm2. Direct charging of the target battery (e.g., NiMH microbattery) is achieved with end-to-end efficiencies up to 90% at AM1.5 illumination and 80% under 100 times reduced intensity. This requires matching the voltages of the photovoltaic module and the battery circumventing maximum power point tracking. Single solar cells show efficiencies up to 10% under AM1.5 illumination and open circuit voltages, Voc, of 450-500mV. To match the battery’s voltage the miniaturised solar cells (~1mm2 area) are connected in series via wire bonding. The chemical sensor platform (mm2 area) is set up to detect hydrogen gas concentration in the low ppm range and over a broad temperature range using a low power sensing interface circuit. Using Telran TZ1053 radio to send one sample measurement of both temperature and H2 concentration every 15 seconds, the average and active power consumption for the SiNAPS mote are less than 350nW and 2.1 μW respectively. Low-power miniaturised chemical sensors of liquid analytes through microfluidic delivery to silicon nanowires are also presented. These components demonstrate the potential of further miniaturization and application of sensor nodes beyond the typical physical sensors, and are enabled by the nanowire materials platform.

[1]  Marc Pastre,et al.  A solar battery charger with maximum power point tracking , 2011, 2011 18th IEEE International Conference on Electronics, Circuits, and Systems.

[2]  Jan Dellith,et al.  Multiple Core–Shell Silicon Nanowire-Based Heterojunction Solar Cells , 2013 .

[3]  A. Majumdar,et al.  Stamp-and-stick room-temperature bonding technique for microdevices , 2005, Journal of Microelectromechanical Systems.

[4]  J. Pendry,et al.  Functional Nanoscale Electronic Devices Assembled Using Silicon Nanowire Building Blocks , 2001 .

[5]  Po-Jen Hsieh,et al.  Label-free detection of protein-protein interactions using a calmodulin-modified nanowire transistor , 2009, Proceedings of the National Academy of Sciences.

[6]  M.A. Alam,et al.  Design Considerations of Silicon Nanowire Biosensors , 2007, IEEE Transactions on Electron Devices.

[7]  William I. Milne,et al.  Overview and status of bottom-up silicon nanowire electronics , 2012 .

[8]  M. Taguchi,et al.  Development status of high-efficiency HIT solar cells , 2011 .

[9]  S C Jakeway,et al.  Miniaturized total analysis systems for biological analysis , 2000, Fresenius' journal of analytical chemistry.

[10]  Chris Van Hoof,et al.  5μW-to-10mW input power range inductive boost converter for indoor photovoltaic energy harvesting with integrated maximum power point tracking algorithm , 2010, 2011 IEEE International Solid-State Circuits Conference.

[11]  Inkyu Park,et al.  Towards the silicon nanowire-based sensor for intracellular biochemical detection. , 2007, Biosensors & bioelectronics.

[12]  T. O'Donnell,et al.  Energy scavenging for long-term deployable wireless sensor networks. , 2008, Talanta.

[13]  Erik Puik,et al.  Ultra low power temperature compensation method for palladium nanowire grid , 2010 .

[14]  Julien Penders,et al.  Energy Harvesting for Autonomous Wireless Sensor Networks , 2010, IEEE Solid-State Circuits Magazine.

[15]  Gavin Conibeer Third-generation photovoltaics , 2007 .

[16]  Martin A. Green,et al.  Solar cell efficiency tables , 1993 .

[17]  Gengfeng Zheng,et al.  Fabrication of silicon nanowire devices for ultrasensitive, label-free, real-time detection of biological and chemical species , 2006, Nature Protocols.

[18]  Heinrich Kurz,et al.  Study of a high contrast process for hydrogen silsesquioxane as a negative tone electron beam resist , 2003 .

[19]  Kristofer S. J. Pister,et al.  SoC Issues for RF Smart Dust , 2006, Proceedings of the IEEE.

[20]  Gabor C. Temes,et al.  Theory and applications of incremental ΔΣ converters , 2004, IEEE Trans. Circuits Syst. I Regul. Pap..

[21]  G. Whitesides,et al.  Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane). , 1998, Analytical chemistry.

[22]  I. Park,et al.  Top-down fabricated silicon nanowire sensors for real-time chemical detection , 2010, Nanotechnology.

[23]  Shui-Tong Lee,et al.  Silicon nanowires for photovoltaic applications: The progress and challenge , 2012 .

[24]  C. Lieber,et al.  Nanowire Nanosensors for Highly Sensitive and Selective Detection of Biological and Chemical Species , 2001, Science.

[25]  Adrian M. Ionescu,et al.  Junctionless silicon nanowire transistors for the tunable operation of a highly sensitive, low power sensor , 2013 .

[26]  C. Van Hoof,et al.  Human++: From technology to emerging health monitoring concepts , 2008, 2008 5th International Summer School and Symposium on Medical Devices and Biosensors.

[27]  Maher Kayal,et al.  Fully integrated ultra-low power management system for micro-power solar energy harvesting applications , 2012 .

[28]  John Barton,et al.  Distributed, Embedded Sensor and Actuator Platforms , 2008 .

[29]  Heinrich Kurz,et al.  Surface roughness of hydrogen silsesquioxane as a negative tone electron beam resist , 2005 .

[30]  Drew Gislason,et al.  Zigbee Wireless Networking , 2008 .

[31]  Naser Khosro Pour,et al.  Fully Integrated Solar Energy Harvester and Sensor Interface Circuits for Energy-Efficient Wireless Sensing Applications , 2013 .

[32]  Kui‐Qing Peng,et al.  Silicon Nanowires for Photovoltaic Solar Energy Conversion , 2011, Advanced materials.

[33]  Stephanus Büttgenbach,et al.  Characterization of long‐term stability of hydrophilized PEG‐grafted PDMS within different media for biotechnological and pharmaceutical applications , 2011 .

[34]  Kaushik Roy,et al.  Maximum power point considerations in micro-scale solar energy harvesting systems , 2010, Proceedings of 2010 IEEE International Symposium on Circuits and Systems.

[35]  G. Jia,et al.  Atomic layer deposited ZnO:Al for nanostructured silicon heterojunction solar cells , 2012 .

[36]  Yunjie Yan,et al.  Synthesis of Large‐Area Silicon Nanowire Arrays via Self‐Assembling Nanoelectrochemistry , 2002 .

[37]  David Blaauw,et al.  A cubic-millimeter energy-autonomous wireless intraocular pressure monitor , 2011, 2011 IEEE International Solid-State Circuits Conference.

[38]  Kofi A. A. Makinwa,et al.  A CMOS smart temperature sensor with a 3σ inaccuracy of ±0.1°C from -55°C to 125°C , 2005, IEEE J. Solid State Circuits.