论文信息 - Influence of low temperature oxidation and nitrogen passivation on the MOS interface of C-face 4H-SiC - 字舞流文

Influence of low temperature oxidation and nitrogen passivation on the MOS interface of C-face 4H-SiC

Y. H. Chang | Shuen-De Wu | Chih-Fang Huang | Tai-Chou Lee | Y. H. Huang | Kung-Yen Lee | C. Chung