Calibration of SiC Detectors for Nitrogen and Neon Plasma Emission Using Gas-Puff Target Sources

A silicon carbide (SiC) detector was calibrated in terms of quantum efficiency (QE) as well as its spectral responsivity at two different wavelength radiations (<inline-formula> <tex-math notation="LaTeX">$\lambda _{N_{2}} = 2.88$ </tex-math></inline-formula> nm and <inline-formula> <tex-math notation="LaTeX">$\lambda _{N_{e}}= 1.35$ </tex-math></inline-formula> nm), using two different calibrated Si detectors, sensitive to the soft X-ray radiation (<inline-formula> <tex-math notation="LaTeX">$\lambda = 0.1\div 10$ </tex-math></inline-formula> nm). An Nd:YAG laser was employed to irradiate a nitrogen and a neon gas-puff target, producing a plasma, which is emitting radiation used for estimation of the detector parameters. A possibility to characterize a new generation of not commercial SiC detectors, with a higher band gap with respect to Si, employing a gas-puff target source, will be presented. Measurements show the SiC detectors QE, equal to 3.4 and 7.1 e/ph for 2.88- and 1.35-nm wavelength radiations, respectively. Calculations and results are reported and discussed.

[1]  Lorenzo Torrisi,et al.  SiC detector characterization for radiation emitted by laser-generated plasmas , 2016 .

[2]  Manijeh Razeghi,et al.  Narrow-gap semiconductor photodiodes , 2000, Photonics West.

[3]  Antonella Sciuto,et al.  High responsivity 4H-SiC Schottky UV photodiodes based on the pinch-off surface effect , 2006 .

[4]  Albert V. Davydov,et al.  Immobilization of streptavidin on 4H-SiC for biosensor development , 2012 .

[5]  Massimo Mazzillo,et al.  Laser-plasma X-ray detection by using fast 4H-SiC interdigit and ion collector detectors , 2015 .

[6]  Andrzej Bartnik,et al.  A Compact “Water Window” Microscope with 60 nm Spatial Resolution for Applications in Biology and Nanotechnology , 2015, Microscopy and Microanalysis.

[7]  Andrzej Bartnik,et al.  Metrology of Mo/Si multilayer mirrors at 13.5 nm with the use of a laser-produced plasma extreme ultraviolet (EUV) source based on a gas puff target , 2006 .

[8]  L. N. Gömze,et al.  New Advanced SiC Ceramics Based on Natural Biomaterials , 2012 .

[9]  Marie Davídková,et al.  Development of a compact laser-produced plasma soft X-ray source for radiobiology experiments , 2015 .

[10]  S. Aslam,et al.  4H-SiC UV photo detectors with large area and very high specific detectivity , 2004, IEEE Journal of Quantum Electronics.

[11]  B. Ozpineci.  Comparison of Wide-Bandgap Semiconductors for Power Electronics Applications , 2004 .

[12]  L. Torrisi,et al.  Angular distribution of ions emitted from Nd:YAG laser-produced plasma , 2002 .

[13]  Q. Wahab,et al.  New materials for micro-scale sensors and actuators An engineering review , 2007 .

[14]  Francesco Moscatelli,et al.  Silicon carbide for UV, alpha, beta and X-ray detectors: Results and perspectives , 2007 .

[15]  Andrzej Bartnik,et al.  Detection of significant differences between absorption spectra of neutral helium and low temperature photoionized helium plasmas , 2013 .

[16]  Xiaping Chen,et al.  Visible blind p-i-n ultraviolet photodetector fabricated on 4H-SiC , 2006 .

[17]  Andrzej Bartnik,et al.  Plasma characterization of the gas-puff target source dedicated for soft X-ray microscopy using SiC detectors , 2016 .

[18]  Benjawan Kjornrattanawanich,et al.  Highly sensitive visible-blind extreme ultraviolet Ni/4H-SiC Schottky photodiodes with large detection area. , 2006, Optics letters.

[19]  Raj Korde,et al.  Silicon carbide photodiodes: future solar-blind EUV/soft x-ray detectors , 2005, SPIE Optics + Photonics.

[20]  V. Raineri,et al.  Highly Efficient Low Reverse Biased 4H-SiC Schottky Photodiodes for UV-Light Detection , 2009, IEEE Photonics Technology Letters.

[21]  Andrzej Bartnik,et al.  Water-window microscopy using a compact, laser-plasma SXR source based on a double-stream gas-puff target , 2013, Applied Physics B.

[22]  Massimo Mazzillo,et al.  4H-SiC Schottky photodiodes for ultraviolet light detection , 2011, 2011 IEEE Nuclear Science Symposium Conference Record.

[23]  Andrzej Bartnik,et al.  Desktop water window microscope using a double-stream gas puff target source , 2015 .

[24]  Massimo Mazzillo,et al.  SiC interdigit detectors for post-accelerated ions generated by laser plasma , 2016 .

[25]  Andrzej Bartnik,et al.  Laser-plasma SXR/EUV sources: adjustment of radiation parameters for specific applications , 2014, Wave and Quantum Aspects of Contemporary Optics.