Scheduling of time constrained dual-arm cluster tools with wafer revisiting
暂无分享,去创建一个
MengChu Zhou | Naiqi Wu | Yan Qiao | Mengchu Zhou | N. Wu | Yan Qiao
[1] Shengwei Ding,et al. Steady-State Throughput and Scheduling Analysis of Multicluster Tools: A Decomposition Approach , 2008, IEEE Transactions on Automation Science and Engineering.
[2] Shengwei Ding,et al. Multicluster tools scheduling: an integrated event graph and network model approach , 2006, IEEE Transactions on Semiconductor Manufacturing.
[3] W.M. Zuberek,et al. Cluster tools with chamber revisiting-modeling and analysis using timed Petri nets , 2004, IEEE Transactions on Semiconductor Manufacturing.
[4] Babak Hamidzadeh,et al. An optimal periodic scheduler for dual-arm robots in cluster tools with residency constraints , 2001, IEEE Trans. Robotics Autom..
[5] Tae-Eog Lee,et al. Scheduling analysis of time-constrained dual-armed cluster tools , 2003 .
[6] Naiqi Wu,et al. System Modeling and Control with Resource-Oriented Petri Nets , 2009 .
[7] Feng Chu,et al. A Petri Net Method for Schedulability and Scheduling Problems in Single-Arm Cluster Tools With Wafer Residency Time Constraints , 2008, IEEE Transactions on Semiconductor Manufacturing.
[8] MengChu Zhou,et al. Modeling and analysis of dual-arm cluster tools for wafer fabrication with revisiting , 2011, 2011 IEEE International Conference on Automation Science and Engineering.
[9] S. Venkatesh,et al. A steady-state throughput analysis of cluster tools: dual-blade versus single-blade robots , 1997 .
[10] NaiQi Wu,et al. Colored timed Petri nets for modeling and analysis of cluser tools , 2010, Asian Journal of Control.
[11] MengChu Zhou,et al. A Closed-Form Solution for Schedulability and Optimal Scheduling of Dual-Arm Cluster Tools With Wafer Residency Time Constraint Based on Steady Schedule Analysis , 2010, IEEE Transactions on Automation Science and Engineering.
[12] Tae-Eog Lee,et al. An extended event graph with negative places and tokens for time window constraints , 2005, IEEE Transactions on Automation Science and Engineering.
[13] Tae-Eog Lee,et al. Scheduling single-armed cluster tools with reentrant wafer flows , 2006 .
[14] MengChu Zhou,et al. Petri Net Modeling and Cycle-Time Analysis of Dual-Arm Cluster Tools With Wafer Revisiting , 2013, IEEE Transactions on Systems, Man, and Cybernetics: Systems.
[15] MengChu Zhou,et al. A Petri Net-Based Novel Scheduling Approach and Its Cycle Time Analysis for Dual-Arm Cluster Tools With Wafer Revisiting , 2013, IEEE Transactions on Semiconductor Manufacturing.
[16] Wai Kin Chan,et al. Optimal Scheduling of Multicluster Tools With Constant Robot Moving Times, Part I: Two-Cluster Analysis , 2011, IEEE Transactions on Automation Science and Engineering.
[17] Wlodzimierz M. Zuberek,et al. Timed Petri nets in modeling and analysis of cluster tools , 2001, IEEE Trans. Robotics Autom..