Supercritical CO_2 extraction of porogen phase: An alternative route to nanoporous dielectrics
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M. Toney | J. Lubguban | T. Rajagopalan | J. Hedstrom | J. Sun | W. Volksen | S. Gangopadhyay | R. D. Miller | A. Mallikarjunan | N. Biswas | B. Lahlouh | S. Simon | H.‐C. Kim | D. Huang