论文信息 - Infrared absorption spectra and compositions of evaporated silicon oxides (SiOx)

Infrared absorption spectra and compositions of evaporated silicon oxides (SiOx)

Abstract Clear and simple relationships among oxygen content, peak position in the 9–10 μm region and intensity of infrared absorption were obtained for a wide range of x value in evaporated silicon oxides (SiOx). Using these relationships, the origin of 875 cm−1 peak was proposed to be due to a vibrational mode from a structural combination of Si(OySi4-y) (y = 2, 3 and 4).

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