Gas detection in the ppb-range with a high frequency, high sensitivity surface acoustic wave device

Abstract We have developed a high sensitivity surface acoustic wave gas sensing device for NO 2 with a detection limit in the ppb range. The sensor layers were phthalocyanines coated by sublimation, the Langmuir-Blodgett technique, and by chemical immobilization. Thickness ranged from one monolayer to 40 nm.