Monolithic Three-Dimensional 65-nm CMOS-Nanoelectromechanical Reconfigurable Logic for Sub-1.2-V Operation

Monolithic three-dimensional (M3D) CMOS-nanoelectromechanical (CMOS-NEM) reconfigurable logic (RL) circuits are experimentally demonstrated. This is the first experimental demonstration of 65-nm M3D CMOS-NEM RL circuits satisfying the 1.2-V supply voltage (<inline-formula> <tex-math notation="LaTeX">${V}_{\mathsf {DD}}$ </tex-math></inline-formula>) requirement of the 65-nm technology node. The fabrication process is identical to the conventional 65-nm CMOS baseline process, in which copper NEM memory switches are formed by a dual damascene process.

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