Amorphous Oxide Semiconductor Thin-Film Transistors

Amorphous oxide semiconductor (AOS) is now commercialized in many flat-panel displays. On the other hand, its electronic structures and defects are largely different from conventional covalent semiconductors such as Si. This chapter explains their origins and reviews the defects that have been known to date. Finally, we will discuss how to fabricate high-quality, stabile AOS.

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