Design and development of a novel micro-clasp gripper for micromanipulation of complex-shaped objects

Abstract This paper presents the design and development of a novel tool, called the micro-clasp gripper, for accomplishing firm and stable gripping and manipulation of complex-shaped micro-scale objects in any orientation using a single rectilinear actuator. The micro-clasp gripper is a compliant mechanism comprised of an endeffector with a closed-loop boundary that can be folded and unfolded in a plane by the action of the rectilinear actuator. Upon actuation, the endeffector of the micro-clasp gripper clasps an object by first encircling the object, and then, folding in on the object to accomplish multi-point contact with the object. This clasping of the micro-object with multi-point contact ensures a stable grip on the object regardless of its shape and initial orientation, even in presence of ambient disturbances the transport of the object or complex micromanipulation and microassembly tasks. The design of the micro-clasp gripper is obtained through a systematic modeling and topology optimization techniques, and a proof-of-principle device is microfabricated using conventional micromachining techniques. The device design is validated through experiment-model correlation studies on the input-output characteristic of the micromachined prototype, and practical feasibility of the clasping functionality of the gripper is demonstrated through experiments involving grasping and repositioning of irregularly shaped micro-particles on a glass substrate.

[1]  Tao Chen,et al.  Design and Fabrication of a Four-Arm-Structure MEMS Gripper , 2009, IEEE Transactions on Industrial Electronics.

[2]  Nicolas Chaillet,et al.  Micromanipulation and Micro-Assembly Systems , 2008 .

[3]  Moon J. Kim,et al.  A sub-micron metallic electrothermal gripper , 2009 .

[4]  Kristofer S. J. Pister,et al.  FLEXURE-BASED TWO DEGREE-OF-FREEDOM LEGS FOR WALKING MICROROBOTS , 2006 .

[5]  W. Brantley Calculated elastic constants for stress problems associated with semiconductor devices , 1973 .

[6]  A. J. Sanchez-Salmeron,et al.  Recent development in micro-handling systems for micro-manufacturing , 2005 .

[7]  N. Chaillet,et al.  Mechanical and Control-Oriented Design of a Monolithic Piezoelectric Microgripper Using a New Topological Optimization Method , 2009, IEEE/ASME Transactions on Mechatronics.

[8]  J. H. Kyung,et al.  Design of a microgripper for micromanipulation of microcomponents using SMA wires and flexible hinges , 2008 .

[9]  R. Wierzbicki,et al.  Electrostatic Silicon Microgripper with Low Voltage of Actuation , 2007, 2007 International Symposium on Micro-NanoMechatronics and Human Science.

[10]  Ping Zhang,et al.  Design Tradeoffs for Electrothermal Microgrippers , 2007, Proceedings 2007 IEEE International Conference on Robotics and Automation.

[11]  Y.C. Lin,et al.  Development of SMA-Actuated Microgripper in Micro Assembly Applications , 2007, IECON 2007 - 33rd Annual Conference of the IEEE Industrial Electronics Society.

[12]  W. Cleghorn,et al.  Microassembly of 3-D microstructures using a compliant, passive microgripper , 2004, Journal of Microelectromechanical Systems.

[13]  Laxman Saggere,et al.  Design of a Compliant Micro-Clasp Mechanism for Micromanipulation Tasks , 2007 .

[14]  Weibin Rong,et al.  A hybrid-type electrostatically driven microgripper with an integrated vacuum tool , 2010 .

[15]  Tian Jian Lu,et al.  Institute of Physics Publishing Journal of Micromechanics and Microengineering Mems Actuators and Sensors: Observations on Their Performance and Selection for Purpose , 2022 .

[16]  K.E. Petersen,et al.  Silicon as a mechanical material , 1982, Proceedings of the IEEE.

[17]  Nicholas G. Dagalakis,et al.  Design of an On-Chip Micro-Scale Nanoassembly System | NIST , 2006 .

[18]  Che-Min Lin,et al.  A shape memory alloy actuated microgripper with wide handling ranges , 2009, 2009 IEEE/ASME International Conference on Advanced Intelligent Mechatronics.

[19]  Sridhar Kota,et al.  Tailoring unconventional actuators using compliant transmissions: design methods and applications , 1999 .

[20]  Zhaowei Zhong,et al.  A microgripper using piezoelectric actuation for micro-object manipulation , 2007 .

[21]  Laxman Saggere,et al.  A multi-fingered micromechanism for coordinated micro/nano manipulation , 2007 .

[22]  Jeong-Bong (JB) Lee,et al.  Viable cell handling with high aspect ratio polymer chopstick gripper mounted on a nano precision manipulator , 2008 .

[23]  Harry E. Stephanou,et al.  High Yield Automated MEMS Assembly , 2007, 2007 IEEE International Conference on Automation Science and Engineering.

[24]  Joe Cecil,et al.  Assembly and manipulation of micro devices-A state of the art survey , 2007 .

[25]  Byung Kyu Kim,et al.  Institute of Physics Publishing Smart Materials and Structures a Superelastic Alloy Microgripper with Embedded Electromagnetic Actuators and Piezoelectric Force Sensors: a Numerical and Experimental Study , 2022 .

[26]  Yassine Haddab,et al.  A microgripper using smart piezoelectric actuators , 2000, Proceedings. 2000 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2000) (Cat. No.00CH37113).