Development of Microsturcture Based on Single-Wall Carbon Nanotube

A fabrication method is devised for integration of long single-wall carbon nanotube (SWNT) into one-dimensional microstructure. Arrays of Mo electrode pairs are fabricated on a SiO2 substrate with micro fabrication process, aligned SWNTs with the length up to one millimeter are then synthesized with catalyst of 0.01M FeCl3 ethanol solution. Based on the control of the air flow, at 900 °C for 30min with Ar2 as the carrier gas, ultralong SWNTs formed bridges that electrically connect the electrodes. Contact pad was fabricated with focused ion beam (FIB) techniques. As a demonstration, microstructure based on single-wall nanotube was presented. Sample characterization was carried out with SEM pictures and I-V curves, which shows that this fabrication strategy combining the micro/nano techniques with CVD synthesis method provides the alternative means for the development of microstructure based on nano materials.