Cross comparison of thin-film tensile-testing methods examined using single-crystal silicon, polysilicon, nickel, and titanium films
暂无分享,去创建一个
Toshiyuki Tsuchiya | Taeko Ando | Masakazu Hirata | Norio Chiba | Y. Saotome | Kazuo Sato | R. Udo | Y. Yoshitomi | K. Takashima | Y. Higo | H. Ogawa | K. Ozaki
[1] K. Suzuki,et al. Measurements of mechanical properties of microfabricated thin films , 1997, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.
[2] Bin Yuan,et al. New test structures and techniques for measurement of mechanical properties of MEMS materials , 1996, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.
[3] S. Johansson,et al. Mechanical characterization of thick polysilicon films: Young's modulus and fracture strength evaluated with microstructures , 1999 .
[4] C. Kim,et al. Microscale material testing of single crystalline silicon: process effects on surface morphology and tensile strength , 2000 .
[5] David T. Read,et al. Cross Comparison of Direct Strength Testing Techniques on Polysilicon Films , 2000 .
[6] R. L. Edwards,et al. Tensile testing of polysilicon , 1999 .
[7] J. Barnard,et al. Effect of Ar gas pressure on growth, structure, and mechanical properties of sputtered Ti, Al, TiAl, and Ti3Al films , 1995 .
[8] J. Schweitz,et al. Evaluation of mechanical materials properties by means of surface micromachined structures , 1999 .
[9] O. Tabata,et al. Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films , 1998 .
[10] M. Shikida,et al. Tensile testing of silicon film having different crystallographic orientations carried out on a silicon chip , 1998 .
[11] Jari Koskinen,et al. Microtensile testing of free-standing polysilicon fibers of various grain sizes , 1993 .
[12] K. Takashima,et al. Fatigue Testing Machine of Micro-Sized Specimens for MEMS Applications , 1999 .
[13] N. Chiba,et al. Young's modulus, fracture strain, and tensile strength of sputtered titanium thin films , 2005 .
[14] Ioannis Chasiotis,et al. Microtensile tests with the aid of probe microscopy for the study of MEMS materials , 2000, SPIE MOEMS-MEMS.